M3P.057 OPTICAL-DRIVEN VORTEX AS A MICROPARTICLE CONCENTATOR 1 3 1 3* 4 S. M Yanl, T H Punde 2, Y. J. Chu , T M Yu , M H Liu , L. Hsu , and C. H Liu 1 Department ofElectrophysics, National Chiao Tung University, Taiwan, R.O.C. 2 Institute ofNanoEngineering and MicroSystems, National Tsing Hua University, Taiwan, R.O.C. 3 Department ofPower Mechanical Engineering, National Tsing-Hua University, Taiwan, R.O.C. 4 SINONAR Company, Taiwan, R.O.C ABSTRACT pattern. This optical-driven approach of controlling the liquid is applied for microparticle concentration. The light-driven optoelectronic vortex concept is firstly reported in this article. Utilizing illuminating light 2. LIGHT-DRIVEN FLOW APPROACH Operation principle of electroosmosis flow image to manipulate the liquid flow direction without any mechanic components is the feature of this design, named as optoelectroosmosis flow (OEOF). With the simple When the electrolyte is full of the micorchamber, the organic free cations are strongly attracted toward the surface and photoconductive material, TiOPc, on the designed ITO generate the electrical double layer (EDL). The term, spin-coating process to form a thin pattern, the projected light pattern is able to generate double, means it is formed by compact ions layer and dynamic diffuse ions layer which are different in the different virtual electrode on the substrate surface. Besides, the non-uniform electric field distribution would distribution of mobile. While the non-uniform electric drive the ions moving with slip velocity. Furthermore, field applies on EDL, the tangential component would two light driven flows with different directions are able to drive the ions in these regions. The velocity of these ions form a clockwise or counter clockwise for microparticles is named the slip velocity. The velocity of these ions is concentration from non-illuminating toward illuminating called the slip velocity, VHOF, which is defined by the region. This convenient approach of light-driven flow and Helmholtz-Smoluchowski equation. [5] microparticle concentration without any mechanical VEOF component enlarge the scope of liquid manipulation field. AD· PDL· Et = -=--=-=-..:.. TJ Where AD is the Debye length, PDL is the charge per unit area of induced charge of the double layer, E/ is the KEYWORDS Optical-driven vortex, light-induced optoelectroosmosis tangential component of the electric field and 11 is the bulk flow, liquid viscosity. microparticle concentration, photoconductivity, TiOPc In this work, photoconductive 1. INTRODUCTION "micro total analysis systems" (J..lTAS) also called as "lab-on-a-chip" conductivity is increased and the charge transport this layer to form a virtual electrode on the surface. It also induces a non-uniform electric field distribution and the sample transport following designed processes. Several utilizing different tangential component of this electric field would generate actuation the ions slip velocity. Due to the virtual electrodes are mechanisms and various micro electro mechanical system induced by the illuminating pattern, the movement of (MEMS) technologies have been reported. [2] Liquid light region pumping methods can be divides into two categories, mechanic-displacement based based micropumps micropumps. The and former the flow integration direction of EOF A schematic diagram of the optical system used for microparticle concentration is shown in concentrator by using dynamic optoelectronic vortex Fig. 1. A mercury lamp provides the light source and projects it on (OEV) approach wherein rotational direction and position the digital micro mirror display (DMD) device. The of the vortex could be manipulated easily by the optical image on the DMD surface is control by a multi-touch image. This method is based on an optoelectroosmosis panel for convenient and intuitive flow manipulation and flow (OEOF) concept [3] utilizing surface induced charge the controlling interface is photoconductive material, programmed with Flash software (Adobe Systems Co., Ltd.). The reflected light TiOPc[ 4], to drive the liquid by projecting light pattern. pattern, which is the same as the image on DMD and Without tuning the parameters, frequency and voltage, the touch panel screen, is projected on the OEOF chip surface flow direction can be manipulated by utilizing the light 978-1-4577-0156-6/11/$26.00 ©2011 IEEE briefly, System design we demonstrate a microparticle on the surface of a able to modifY the liquid pumping with light pattern. the liquid. The latter applied external ac/dc to generate slip In phenomenon and photoconductive material realizes the uniform or non-uniform electric field for liquid driving. article is immediately. requires some components for active moving to disturb In this the When the light image projects on TiOPc surface, it systems have been developed during the last few decades [1). Liquid field-induced-flow organic define material. A 500 nm TiOPc layer is placed on the electrode. manipulation would be applied for chemical or biological micropumps the to modified by the light illuminating is the feature of this Complex liquid handling techniques like pumping, of utilized TiOPc, non-uniform electric field. The conductivity would be mixing, and reaction in sorts we material, and aligned to the designed indium tin oxide (ITO) pattern. 242 Transducers' 11, Beijing, China, June 5-9, 2011 A function generator (33120A, Agilent) is utilized to G2 are the gap, 10 /lm. Therefore, the ratio of the electrode supply the AC voltage. The experimental results were and gap, Wl:Gl:W2:G2, is 3:1:5:1. Even so, this ratio is observed and recorded by a charge-coupled device (CCD) not good efficiency to pump the liquid. How to switch this fixed ratio into high efficiency liquid pumping ratio is the which was connected to the personal computer. Multi-touch panel feature of OEOF design. rF�;;;;;;�iJ � � Light micromirror Lens2 device � � - �� Lens1 Lamp Figure 1. DEDF optical system design. A straight light powered by UHP Hg Lamp through a pair of beam collimation focusing is projected on the DMD surface and the light pattern is reflected onto DEDF chip surface. The applied voltage and frequency is controlled by a function generator and the DEDF phenomenon is recorded by a charge-coupled device (CCD). OEOF chip fabrication o Pyrex As the EOF principle described before, the virtual f2j AZ4620 electrode on the TiOPc surface would generate ions moving and surface slip velocity. The liquid is pumped from non-illuminating However, a single toward light illuminating pattern would • ITO �TiOPc Figure. 2 The DEDF chip fabrication process. (a)�(d) The lift-off process is utilized to define the ITO pattern position. (e) A hardened thin TiDPc layer is fabricated on the ITO pattern after spin-coating process and hot plat heating. region. generate • Mask a symmetry liquid flow and they are neutralized to result in zero net flow. Therefore, a pair of asymmetric electrodes is designed to generate a net flow on the surface and a series of these electrodes would enlarge the liquid pumping effect. The OEOF chip fabrication process is shown in Fig.#. We utilize lift-off process to pattern the ITO image on the glass. Firstly, the ITO electrode size and position are defined with AZ4620 positive photoresist, Fig. 2(a)(b). Next, a 2000 A thick ITO layer is deposited on a cleared Pyrex-PR substrate by RF sputter system, Fig. 2(c). Finally, acetone organic solvent is applied to remove the AZ4620 layer. ITO pattern is fabricated on the Pyrex substrate, Fig. 2(d). A thin TiOPc layer is spin-coated on the substrate to cover the ITO pattern at 1500 rpm for 20 s. After baking at 130°C for 30 min, the TiOPc structure is hardened. Fig. 3(a) shows the ITO pattern design which consists of a pair comb-like electrodes with different electrode width. A thin TiOPc layer, light blue color, Figure 3 (a) A pair comb-like ITO pattern generates a series of particular electrode sequence. (b) TiOPc layer thin 230nm cover on ITO pattern. (c) WI and W2 are ITO electrodes and GI and G2 are the gap between neighbor electrodes. Operation principle coated on the ITO pattern is shown in Fig.3 (b). The width The key principle of OEOF is to transform a of large and small ITO pattern is 30/lm and 70/lm. The sequence of fixed ITO electrode into another sequence of gap between each electrode is 10 /lm. In Fig.3(c), WI and virtual electrode by utilizing the conductive property of W2 are the ITO electrode, 30/lm and 70/lm, and Gl and organic photoconductive material, TiOPc. As illustrated 243 in Fig. 4 (A), the overlapping area of the ITO pattern and (a) the light pattern determine the virtual electrode pattern on the TiOPc surface. Without light pattern illuminating on Os (b) the TiOPc layer, the charges are confined under the photoconductivity material and on the ITO electrode. 2s (c) When the light pattern projected on the TiOPc surface, the 4s TiOPc conductivity increases and the charges transport (d) through TiOPc layer to assemble and form the virtual electrode to generate non-uniform electric field. In suitable low ac frequency condition, this electric field (e) distribution would induce the surface charge to move with slip velocity. pattern to redefine the virtual electrode location. When large ITO electrode, 50flm, and one-third of the small direction and when the light pattern shifts 20flm in the rightward direction, the virtual electrode sequence is changed as shown in Fig. 4(B) and the flow direction is reversed immediately. I en (b ) I I i I 12 s (h) ITO electrode, 30flm, the charge transforms on the shown in Fig. 4(A), the liquid is pumped in the rightward 10 s (g) the 70flm wide light pattern covers the entire area of the electrode. When the sequence of virtual electrode is as 8s (t) Following above principle, we can utilize light photoconductive layer to form another sequence of virtual 6s 14 S Figure 5. (a)�(h) Top view of DEOF chip. (a)�(d)A moving 20 f.lITl diameter polystyrene bead illustrates the rightward liquid flow driven with DEDF. (e)�(h) We shift the light pattern rightward 20 f.lITl and the virtual electrode sequence is reversed. The leftward moving bead indicates that the charge re-distribution reverses the flow direction. The relationship between applied voltage and liquid It' IT7 lit' FP1£ velocity is shown in Fig. 6. The applied ac voltage is selected as 8, 8.5, 9, 9.5, and 10 voltage. Because the microparticle is driven with slip flow, to measure the I I ! microparticle velocity would estimate the liquid flow speed. Accorrding to the measurement results, as the Light pattern applied ac voltage increases, it would generate larger :=�:==���:;::--------��-------£:::��:�:�����=�:jf-- magnitude of non-uniform electric field and pump the I I t' IT7 I I ! I 't' FP1£ +++++++++++++++ I�! surface ions with faster slip velocity. +++++++-++++++++ 30 25 '" """- E S Light pattern shift Figure 4. The side view of DEDF chip. Utilizing light to manipulate the liquid flow direction is the key technology. (A) The illuminating region induces charge on the TiOPc surface and the virtual electrode sequence makes the liquid flow. (B) The rightward shift of the light pattern reverses the virtual electrode sequence on TiDPc surface and the flow direction. ''5 15 o � 10 u. o o 5 7.5 8 9 8.5 9.5 10 10.5 Voltage (Vp.p.) Figure 6. The DEDF velocity plotted against applied voltage (I/) is fitted with v=KV2 where K is constant [6]. The increasing applied voltage generates fast liquidflow velocity. 3. EXPERIMENT RESULTS Light-driven liquid flow The to and fro pumping 20 > process of the liquid is shown in Fig. 5. The light pattern is projected on the ITO Microparticle concentration pattern as above description, one-third of the small ITO Utilizing the light pattern shift to reverse the liquid electrode and entire large ITO electrode. The surface ions flow slip would drive the microparticle rightward, (a)�(d). As direction, it also provides the flexibility to manipulate the liquid as depicted in Fig. 7. As depicted in the projecting light pattern shifts, the liquid pumping the Fig. 7 (a), when the light pattern is aligned with the direction is reversed immediately, (e)�(h). The processes ITO pattern precisely, the liquid at the left and right half demonstrate the convenience and flexibility of liquid are driven in opposite direction leading to the formation manipulation with light pattern. of a vortex by the OEOF. Another feature of this light-driven vortex is that the flow direction change is 244 immediate following the light pattern shifts without left and right half are shifted and the micro particles are concentrated at the center of clockwise vortex. tuning any external ac conditions, voltage or frequency. This operation makes the flow manipulation more 4. CONCLUSIONS convenient. The light-driven approach for liquid pumping has Following the flow of counterclockwise vortex, the microparticles spreaded on the chip are concentrated been reported. The integration of photoconductivity toward the center of the vortex which is the boundary of material and patterned ITO glass realizes the method left and right light pattern. When the left and right light utilizing dynamic light pattern to manipulate the lquid pattern parts are shifted to cover the suitable ITO region flow in micro scale. In this article, we develop this to make the left part liquid upward and right part liquid concept and demonstrated the application of OEOF to downward, the clockwise vortex is generated shown in generate the optoelectronic vortex for concentration of Fig. 7(b) 8flm size microparticles by using light image with good control over the liquid flow manipulation. ACKNOWLEDGEMENTS This project was financially sponsored by the National Science Council (Grant No.98-2120-M-007003). We extend special thanks to the staff of the Biophysical University Laboratory and the at National Chiao Micro-Systems and Tung Control Laboratory (MSCL) at National Tsing Hua University for their assistance. We are also thankful to Prof. Hwan-You Chang o o ITO 0 D Virtual Light pattern Liquid flow • electrode 8 illustrates the application of OEV [3] Shih-Mo Yang, Rong-Jhe Chen,Tung-Ming Yu, Hang-Ping Huang, Long Hsu and Cheng-Hsien Liu, "An adaptive bi-directional micro-pump by using light-induced electroosmosis", Proc. MicroTAS 2010, Netherlands, 3-7 October, 2010. [4] Shih-Mo Yang et aI., "Dynamic manipulation and Fig. 8(b) when we separate the right and the left part of patterning the light pattern with a distance, the region between two driving force and Hua Engineering", J Fluids Eng. , 124, pp.384-392, 2002. flows generate a counterclockwise vortex indicated by the liquid and Tsing "MEMS-micropumps: a review, Journal of Fluids for mobile 8flm diameter polystyrene beads. As observed in no Microbiology National T. "Microfluidic tools for cell biological research." and right part is opposite, downward and upward. These has his at Nano Today 5, pp.28-47, 2010. [2]N. T. Nguyen, X. Huang and T. K. Chuan, optoelectronic flow. The direction of liquid flow at left images of REFERENCES: 8(a) illustrates a counterclockwise vortex driven by microparticles are concentrated in this area staff Laboratory [1]Velve-Casquillas, G., Le Berre, M., Piel, M. & Tran, P. microparticle concentration. using the light pattern. Fig. light the University for their support. MicroparticIe Figure 7. Top view of the chip with optoelectronic vortex. (A) The alignment of ITO and light pattern makes the left halfand the right half to pump the liquid in opposite directions and the optoelectronic vortex is generated. (B) After shifting the light pattern the direction of the vortex changes. Fig. and Biotechnology of TiOPc-based the microparticles optoelectronic and cells by using dielectrophoresis", Optics letters, 35, 12, 2010. due to the [5] Jamshidi, Arash and Neale, Steven L. and Yu, formation of vortex in clockwise. These processes mean Kyoungsik and Pauzauskie, Peter J. and Schuck, Peter the flow direction of vortex is able to be control only with James and Valley, Justin K. and Hsu, Hsan-Yin and projected light image. Ohta, Aaron T. and Wu, Ming C., "NanoPen: Dynamic, Low-Power, and Light-Actuated Patterning (a) of Nanopartic1es", Nano Letters, 9, 8, 2921, 2009. [6] Brown, et ai. "Pumping of water with ac electric fields applied to asymmetric pairs of microelectrodes", Physical Review E 63, 016305, 2000. CONTACT *Cheng-Hsien Liu, Tel: +886-3-5715131#33706; Figure 8. Micropraticle concentration by light-driven optoelectronic vortex. (A) A counterclockwise vortex is generated at the border of the light pattern and 8 /fffl diameter microparticles are concentrated. (B) The light patterns at the [email protected] Shih-Mo Yang, Tel: +886-3-5715131#33793; [email protected] 245